Modern Electron Spin Resonance Techniques in Semiconductors Science and Technology

by Aharon Blank

at Condensed Matter Seminar

Mon, 12 May 2014, 11:30
Physics building (#54) room 207


The investigation of paramagnetic species such as point defects dopants and impurities in semiconductor devices is of significance as they affect device performance Conventionally these species are detected and imaged by electron spin resonance ESR technique Many times ESR is not sensitive enough to deal with miniature devices having small number of paramagnetic species and high spatial heterogeneity Recently we have been developing and applying new methodologies that e

Created on 07-05-2014 by Bar Lev, Yevgeny (ybarlev)
Updaded on 07-05-2014 by Bar Lev, Yevgeny (ybarlev)